Liquid assisted plasma enhanced chemical vapour deposition with a non-thermal plasma jet at atmospheric pressure
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چکیده
منابع مشابه
Plasma-Assisted Deposition at Atmospheric Pressure
In plasma-assisted deposition methods the activation energy necessary for the initiation of chemical reactions is transferred via charged particles. Due to this fact in many cases the process temperature can be kept small, if gas discharges at pressures below 1 hPa are used. On the other hand low pressure requires a great deal of vacuum equipment. Processes at atmospheric pressure are more favo...
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ژورنال
عنوان ژورنال: Thin Solid Films
سال: 2017
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2016.09.022